On-line concentration monitoring
Semiconductor industry
Ultrasonic concentration analyzers measure the velocity of ultrasonic waves in a liquid at different temperatures. One unique feature of concentration measurements using ultrasonic waves is a maintenance free design with no periodical adjustments nor calibrations to be performed during the lifetime of the sensor.
Real-time continuous measurements are performed by very small ultrasonic propagations without any influence on chemical formations. The analyzers are available either for measuring one separate concentration or two concentrations at the same time (ternary). The compact and light flow cell type transducers can be integrated easily at any point in the process.
Applications
- CMP, CMP slurry
- Cleaning
- Etching
- Dilution
Parameters
HF - H2SO4 - KOH - NH3 -H2O2 - HCl - TMAH - HNO3 - BHF
Ternary: NH3+H2O2 - HCl+H2O2 - H2SO4+H2O2 - HF+HNO3
Calibration
An extended library of standard calibration curves is available and one of them will very probably meet your application.
Calibration curves specific to each application are stored on a data rom which is installed in the transmitter.